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Rick Deckers
Rick Deckers
Cobalt
Nitride
Atomic layer deposition
Inorganic chemistry
Plasma
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2024
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Plasma-Enhanced Atomic Layer Deposition of Cobalt and Cobalt Nitride: What Controls the Incorporation of Nitrogen?
2020
Journal of Physical Chemistry C
Gerben van Straaten
Rick Deckers
Martijn F. J. Vos
Wilhelmus M. M. Kessels
Mariadriana Creatore
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