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sati hon tetuya
sati hon tetuya
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Ar/N 2 ループ型誘導熱プラズマを用いたSi基板窒化度の窒素流量依存性
2020
sugiyama yuuki
oozeki motonori
tanaka yasusi ki
nakano yuusuke
uesugi yosihiko
isizima tatuo
sati hon tetuya
kawaura kou
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Ar/N 2 ループ型誘導熱プラズマを用いたSi基板表面の窒化試験
2019
oozeki motonori
fuzita atusi
tanaka yasusi ki
uesugi yosihiko
isizima tatuo
sati hon tetuya
kawaura kou
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ループ型Ar/O2誘導熱プラズマを用いたSi/SiC基板に対する高速酸化試験
2017
fuzita atusi
tutiya taku hikari
tanaka yasusi ki
uesugi yosihiko
isizima tatuo
sati hon tetuya
kawaura kou
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大面積・高速表面酸化処理を目的としたループ型Ar/O2誘導熱プラズマの発光分光観測
2017
tutiya taku hikari
maruyama yuuzi
fuzita atusi
tanaka yasusi ki
uesugi yosihiko
isizima tatuo
sati hon tetuya
kawaura kou
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ループ型Ar/N 2 /H 2 誘導熱プラズマを用いたTi基板表面の高速窒化試験
2017
fuzita atusi
tutiya taku hikari
tanaka yasusi ki
uesugi yosihiko
isizima tatuo
sati hon tetuya
kawaura kou
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