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Jin-Baek Park
Jin-Baek Park
Hanyang University
Ellipsometry
Haze
Photolithography
Process window
Lithography
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Haze detection and haze induced process latitude variation for Low-k1 193 nm lithography
2006
Sung-Jin Kim
Jin-Baek Park
Sung Hyuck Kim
Hye-Young Kang
Young-Min Kang
Seung-Wook Park
Ilsin An
Hye-Keun Oh
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