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L. He
L. He
Singapore–MIT alliance
Materials science
Inorganic chemistry
multi layer
Chemical engineering
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A Study on the Properties of Different IMP Ta, Ta(N) and Multi-Layer Ta/Ta(N) as Diffusion Barriers for Cu Metallization
2001
MRS Proceedings
L. He
Chao Yong. Li
Z.Q. Zeng
Jun-Jie Wu
Y. Qian
Yaohui Zhang
H.D. Liu
Joseph Xie
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