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T. Rehfeldt
T. Rehfeldt
Delft University of Technology
Graphene
Electron-beam lithography
Nanopore
Microelectromechanical systems
Membrane
2
Papers
14
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Through-membrane electron-beam lithography for ultrathin membrane applications
2017
Applied Physics Letters
M. Neklyudova
A.K. Erdamar
L. Vicarelli
Stephanie J. Heerema
T. Rehfeldt
Gregory Pandraud
Zahra Kolahdouz
Cees Dekker
H.W. Zandbergen
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Citations (8)
Through-membrane electron-beam lithography for ultrathin membrane applications
2017
Applied Physics Letters
M. Neklyudova
A.K. Erdamar
L. Vicarelli
Stephanie J. Heerema
T. Rehfeldt
Gregory Pandraud
Z. Koladouz Esfahani
Cees Dekker
H.W. Zandbergen
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Citations (6)
1