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Masaki Yoshimaru
Masaki Yoshimaru
Sony Broadcast & Professional Research Laboratories
Raman spectroscopy
Spectroscopy
Silicon on insulator
Analytical chemistry
Strain (chemistry)
2
Papers
18
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Evaluation of local strain in Si using UV-Raman spectroscopy
2009
Materials Science and Engineering B-advanced Functional Solid-state Materials
Atsushi Ogura
Daisuke Kosemura
Munehisa Takei
Hidetsugu Uchida
Nobuyoshi Hattori
Masaki Yoshimaru
Satoru Mayuzumi
Hitoshi Wakabayashi
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Citations (10)
Evaluation of Strain in Si-on-Insulator Substrate Induced by Si3N4 Capping Film
2008
Japanese Journal of Applied Physics
Atsushi Ogura
Daisuke Kosemura
Yasuto Kakemura
Tetsuya Yoshida
Hidetsugu Uchida
Nobuyoshi Hattori
Masaki Yoshimaru
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Citations (8)
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