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N. Joshi
N. Joshi
Florida International University
Nanotechnology
Lithography
Wafer
Physics
Barrier layer
1
Papers
4
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An electrical defectivity characterization of wafers imprinted with step and flash imprint lithography
2007
Proceedings of SPIE
William J. Dauksher
Ngoc V. Le
K. Gehoski
Eric S. Ainley
Kevin J. Nordquist
N. Joshi
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Citations (4)
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