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Yoshio Ito
Yoshio Ito
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Study of device mass production capability of the character projection based electron beam direct writing process technology toward 14 nm node and beyond
2012
Journal of Micro-nanolithography Mems and Moems
Yoshinori Kojima
Yasushi Takahashi
Masaki Takakuwa
Shuzo Ohshio
Shinji Sugatani
Ryo Tujimura
Hiroshi Takita
Kozo Ogino
Hiromi Hoshino
Yoshio Ito
Masaaki Miyajima
Jun-ichi Kon
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A method and apparatus for producing semiconductor exposure data
1998
Yoshio Ito
Masaaki Miyajima
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