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Marinus Werber
Marinus Werber
Materials science
Wafer dicing
Silicon
Optoelectronics
Isotropic etching
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Publisher’s Note: “Silicon field emitters fabricated by dicing-saw and wet-chemical-etching” [J. Vac. Sci. Technol. B 39, 013205 (2021)]
2021
Journal of Vacuum Science & Technology. B. Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
Simon Edler
Andreas Schels
Josef Biba
Walter Hansch
Michael Bachmann
Felix Düsberg
Marinus Werber
Christoph Langer
Manuel Meyer
David von Bergen
Andreas Pahlke
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Silicon Field Emitters fabricated by Dicing-Saw and TMAH-Etch
2020
IVNC | International Vacuum Nanoelectronics Conference
Simon Edler
J. Biba
Walter Hansch
Michael Bachmann
Felix Düsberg
Christoph Langer
Andreas Schels
Marinus Werber
Andreas Pahlke
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