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M. Collot
M. Collot
Alcatel-Lucent
Exfoliation joint
Hydrogen
Silicon
Electronic engineering
Ion implantation
3
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92
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Mechanism of silicon exfoliation induced by hydrogen/helium co-implantation
1998
Applied Physics Letters
M. K. Weldon
M. Collot
Yves J. Chabal
V. C. Venezia
A. Agarwal
T. E. Haynes
D. J. Eaglesham
S. B. Christman
E. E. Chaban
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Citations (88)
Mechanism of silicon exfoliation by hydrogen implantation and He, Li and Si co-implantation [SOI technology]
1997
SOI | International SOI Conference
M. K. Weldon
V. E. Marsico
Yves J. Chabal
M. Collot
Yves Caudano
S. B. Christman
E. E. Chaban
D.C. Jacobson
W.L Brown
J. Sapjeta
C.-M. Hsieh
C.A. Goodwin
A. Agarwal
V. C. Venezia
T. E. Haynes
W.B. Jackson
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Citations (2)
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