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Ho-Ki Lee
Ho-Ki Lee
Samsung
Optoelectronics
Low voltage
High voltage
Etching (microfabrication)
Wafer
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Focus ring geometry influence on wafer edge voltage distribution for plasma processes
2021
Journal of Vacuum Science and Technology
Yuhua Xiao
Yao Du
Carl Brent Smith
Sang Ki Nam
Ho-Ki Lee
Jang-Yeob Lee
Steven Shannon
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