Old Web
English
Sign In
Acemap
>
authorDetail
>
Yong Feng Fu
Yong Feng Fu
GlobalFoundries
Coating
Nanotechnology
Lithography
Photolithography
Shallow trench isolation
1
Papers
3
Citations
0
KQI
Citation Trend
Filter By
Interval:
1900~2024
1900
2024
Author
Papers (1)
Sort By
Default
Most Recent
Most Early
Most Citation
No data
Journal
Conference
Others
A novel method to reduce wafer topography effect for implant lithography process
2010
Proceedings of SPIE
Lei Yuan
Sanggil Bae
Yong Feng Fu
Ao Chen
Hui Peng Koh
Qun Ying Lin
Show All
Source
Cite
Save
Citations (3)
1