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Sergey D Poletayev
Sergey D Poletayev
Russian Academy of Sciences
Oxygen
Oxide
Etching (microfabrication)
Reactive-ion etching
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Reactive ion etching of indium-tin oxide films by CCl4-based Inductivity Coupled Plasma
2016
Sucheta Juneja
Sergey D Poletayev
Sergey A. Fomchenkov
S. N. Khonina
R. V. Skidanov
Nikolay L. Kazanskiy
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