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Young-Ha Yoon
Young-Ha Yoon
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Radiochemistry
Ion implantation
Doping
Boron
Hydrogen
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Ion implanter performance improvement for boron doping by using boron trifluoride (BF 3 ) and hydrogen (H 2 ) mixture gases
2014
Ying Tang
Oleg Byl
Young-Ha Yoon
Sharad Yedave
Biing-Tsair Tien
Steve Bishop
Joseph D. Sweeney
Shin Woo Kang
Jun Jin Kang
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