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M. Shilinskas
M. Shilinskas
Dry etching
Isotropic etching
Reactive-ion etching
Etching (microfabrication)
Inorganic chemistry
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THE STUDY OF SILICON SURFACE AFTER REACTIVE ION ETCHING
1998
Lithuanian physics journal
Zh. Rutkuniene
M. Shilinskas
A. Grigonis
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