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F. Mosselveld
F. Mosselveld
Ion beam
Dielectric
Nanotechnology
Copper
Chemistry
1
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Circuit editing of copper and low-k dielectrics in nanotechnology devices.
2004
Journal of Microscopy
F. Mosselveld
V. V. Makarov
T.R. Lundquist
D. P. Griffis
P.E. Russell
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Citations (7)
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