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Kun Yu Li
Kun Yu Li
Southeast University
Resonator
Electrode
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Microelectromechanical systems
Tuning fork
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Formation of Side Electrode on Quartz MEMS-Based Double-Ended Tuning Fork Using Enhanced Lift-Off Process
2011
Advanced Materials Research
Jin Xing Liang
Xue Feng Li
Yun Fang Ni
Hongsheng Li
Li Bin Huang
Kun Yu Li
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