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Chun-Yeh Hsu
Chun-Yeh Hsu
Industrial Technology Research Institute
Chemical vapor deposition
Thermal
Boltzmann equation
Interfacial thermal resistance
Perpendicular
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Thermal Conductivity of Si/SiGe Superlattice Film
2008
Chun Kai Liu
Heng-Chieh Chien
Ming-Ji Dai
Chih-Kuang Yu
Chun-Yeh Hsu
Mei-Jiau Huang
Guang–Li Luo
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