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Monica Hilgarth
Monica Hilgarth
Chemistry
Ion implantation
Vacuum chamber
Manipulator
Analytical chemistry
2
Papers
5
Citations
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Novel Zirconium precursors for Atomic Layer Deposition of ZrO2 films
2008
Tianniu Chen
Thomas M. Cameron
Shawn D. Nguyen
Gregory T. Stauf
David W. Peters
Leah Maylott
Weimin Li
Chongying Xu
Jeffrey F. Roeder
Bryan C. Hendrix
Monica Hilgarth
Jaakko Niinistö
Kaupo Kukli
Mikko Ritala
Markku Leskelä
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Citations (4)
Development of “Static” In‐Situ Implanter Chamber Cleaning
2008
Sharad Yedave
Joe Sweeney
Oleg Byl
Shkelqim Letaj
Mike Wodjenski
Monica Hilgarth
Paul J. Marganski
Steve Bishop
David Eldridge
Robert Kaim
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Citations (1)
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