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M. T. Postek
M. T. Postek
National Institute of Standards and Technology
Engineering
Metrology
Electronic engineering
Materials science
Nano-
4
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27
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MSEC 2009 State-of-Art Paper: Micro/Nano-Technology Applications for Manufacturing Systems and Processes
2009
Toshiyuki Obikawa
M. T. Postek
David Dornfeld
Richard Liu
Ranga Komanduri
Yuebin Guo
Jing Shi
Jian Cao
Jack Zhou
Xiaoping Yang
Xiaochun Li
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Citations (4)
Fine-Line Metrology
1992
M. T. Postek
R.D. Larrabee
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Citations (4)
Fine-Line Metrology
1992
M. T. Postek
R.D. Larrabee
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Citations (4)
SEM-based System For Calibration Of Linewidth SRMs For The IC industry
1986
D. Nyyssonen
M. T. Postek
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Citations (15)
1