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Taishi Segawa
Taishi Segawa
Electrostatic discharge
Electronic engineering
Materials science
water spray
Optoelectronics
3
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2024
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Clarification and Countermeasures of Electrostatic Discharge in High-Pressure Spray Cleaning During Flat-Panel Display Manufacturing
2020
Yoshiyuki Seike
Yasuaki Fukuoka
Tatsuo Mori
Taishi Segawa
Yoshinori Kobayashi
Keiji Miyachi
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Electrostatic discharge prevention in ultra-pure water spray cleaning aimed at CFM
2019
ASMC | Advanced Semiconductor Manufacturing Conference
Yoshiyuki Seike
Hiroyuki Matsuoka
Shingo Matsuki
Taishi Segawa
Yoshinori Kobayashi
Keiji Miyachi
Tatsuo Mori
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Electrostatic Discharge Prevention in the Ultra-Pure Water Spray Cleaning of Semiconductor Chips using Induction Charging. (2 nd Report; Consideration with Position and Shape of an Inductive charge device)
2018
The Japan Society of Applied Physics
Yoshiyuki Seike
Hayato Watanabe
Syogo Miyagawa
Tatsuo Mori
Taishi Segawa
Yoshinori Kobayashi
Keiji Miyachi
Masahiko Amari
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