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Meng Ong
Meng Ong
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Laser
Optical proximity correction
Chromatic aberration
Electronic engineering
1
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21
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Effects of laser bandwidth on OPE in a modern lithography tool
2006
Kevin Huggins
Toki Tsuyoshi
Meng Ong
Robert J. Rafac
Christopher Treadway
Devashish Choudhary
Takehito Kudo
Shigeru Hirukawa
Stephen P. Renwick
Nigel R. Farrar
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Citations (21)
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