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Jyrki Kiihamäki
Jyrki Kiihamäki
VTT Technical Research Centre of Finland
Microelectromechanical systems
Flexural strength
Analytical chemistry
Deep reactive-ion etching
Anodic bonding
2
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47
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Wobbling Mode AlN-Piezo-MEMS Mirror Enabling 360-Degree Field of View LIDAR for Automotive Applications
2019
IUS | Internaltional Ultrasonics Symposium
Tuomas Pensala
Jyrki Kiihamäki
Jukka Kyynäräinen
James Dekker
Sergey Gorelick
Panu Pekko
Tapio Pernu
Oili Ylivaara
Feng Gao
Dmitry Morits
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Citations (4)
Stability of wafer level vacuum encapsulated single-crystal silicon resonators
2006
Sensors and Actuators A-physical
V. Kaajakari
Jyrki Kiihamäki
Aarne Oja
Sami Pietikäinen
Ville Kokkala
Heikki Kuisma
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Citations (43)
1