Old Web
English
Sign In
Acemap
>
authorDetail
>
E. Aparico
E. Aparico
Nanotechnology
Plasma
Plasma etching
Porosity
Materials science
1
Papers
2
Citations
0
KQI
Citation Trend
Filter By
Interval:
1900~2024
1900
2024
Author
Papers (1)
Sort By
Default
Most Recent
Most Early
Most Citation
No data
Journal
Conference
Others
Plasma etch challenges at 14nm and beyond technology nodes in the BEOL
2015
IITC | International Interconnect Technology Conference
P. Brun
F. Bailly
M. Guillermet
E. Aparico
Nicolas Posseme
Show All
Source
Cite
Save
Citations (2)
1