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Y.K. Chiu
Y.K. Chiu
National Tsing Hua University
Dielectric
High-κ dielectric
Oxide
Leakage (electronics)
Molecular beam epitaxy
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A novel approach of using a MBE template for ALD growth of high-κ dielectrics
2007
Journal of Crystal Growth
K.Y. Lee
W. C. Lee
M. L. Huang
C.-H. Chang
Y.J. Lee
Y.K. Chiu
Tai-Bor Wu
M. Hong
Raynien Kwo
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Citations (6)
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