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Yasuhiro Shigetoshi
Yasuhiro Shigetoshi
Kyoto University
Sputter deposition
Transmittance
Thin film
Amorphous solid
Dopant
1
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2
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Electrical Properties and Microstructures of Ultraviolet Transparent Ga2O3 Thin Films
2007
Materials Science Forum
Yasuhiro Shigetoshi
Susumu Tsukimoto
Hidehisa Takeda
Kazuhiro Ito
Masanori Murakami
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