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Hari Hedge
Hari Hedge
Veeco
Ion beam
Deposition (law)
Reticle
Radiochemistry
Sputter deposition
2
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8
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Reticle blanks for extreme ultraviolet lithography: Ion beam sputter deposition of low defect density Mo/Si multilayers
1996
Stephen P. Vernon
D.R. Kania
Patrick A. Kearney
R.A. Levesque
Alan V. Hayes
B. Druz
E. Osten
Renga Rajan
Hari Hedge
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Citations (2)
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