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Hidehiko Kozawa
Hidehiko Kozawa
Mitsubishi Electric
Wavelength
Optics
Geometrical optics
Angle of incidence
Modulation
2
Papers
5
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2024
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Simple and high sensitive focus monitoring utilizing an aperture on backside of photomask
2003
Shuji Nakao
Junjirou Sakai
Shinroku Maejima
Atsushi Ueno
Akihiro Nakae
Shigenori Yamashita
Ken-ichi Itano
Hidehiko Kozawa
Akira Tokui
Kouichirou Tsujita
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Zero MEF hole formation with Atten-PSM and modified illumination
2003
Shuji Nakao
Tadashi Miyagi
Shinji Tarutani
Shigenori Yamashita
Junji Miyazaki
Hidehiko Kozawa
Akira Tokui
Kouichirou Tsujita
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