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D. Schnurbusch

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In situ Characterization of Exposed E-Beam Resist Using Novel AFM Technique

2010 Microscopy and Microanalysis
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In situ direct visualization of irradiated electron-beam patterns on unprocessed resists using atomic force microscopy

2010 Journal of Vacuum Science & Technology. B. Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
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In situ direct visualization of irradiated electron-beam patterns on unprocessed resists using atomic force microscopy

2010 Journal of Vacuum Science & Technology. B. Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
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Citations (4)