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Sumarlin Goh
Sumarlin Goh
University of Texas at Austin
Numerical aperture
Immersion lithography
Immersion (virtual reality)
Refractive index
Chemistry
2
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8
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The effect of added salts on the optical properties of water for high index immersion lithography fluids
2008
Journal of Vacuum Science & Technology B
J. Christopher Taylor
Elizabeth A. Costner
Sumarlin Goh
William A. Wojtczak
Dean Dewulf
C. Grant Willson
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Citations (4)
Fluids and resists for hyper na immersion lithography
2005
J. Christopher Taylor
Ramzy Shayib
Sumarlin Goh
Charles R. Chambers
Will Conley
Shang-Ho Lin
C. Grant Willson
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Citations (4)
1