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Jun Yoshikawa
Jun Yoshikawa
Analytical chemistry
Plasma
Optics
Radial line
Slot antenna
4
Papers
23
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Temporal evolution of as-developed line and space photoresist profiles during etch.
2016
Bulletin of the American Physical Society
Barton Lane
Peter L. G. Ventzek
Alok Ranjan
Vinayak Rastogi
Jun Yoshikawa
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Measurements and modeling of the impact of weak magnetic fields on the plasma properties of a planar slot antenna driven plasma source
2015
Journal of Vacuum Science and Technology
Jun Yoshikawa
Yoshio Susa
Peter L. G. Ventzek
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Self-Consistent Simulations of the Radial Line Slot Antenna Plasma Source
2013
Bulletin of the American Physical Society
Peter L. G. Ventzek
Rochan Upadhyay
Michitaka Aita
Jun Yoshikawa
Toshihiko Iwao
Kiyotaka Ishibashi
Laxminarayan L. Raja
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Computational modeling study of the radial line slot antenna microwave plasma source with comparisons to experiments
2013
Journal of Vacuum Science and Technology
Laxminarayan L. Raja
Shankar Mahadevan
Peter L. G. Ventzek
Jun Yoshikawa
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Citations (23)
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