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Yong-Hyeop Kim

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Deformation analysis of the surface micromachined MEMS structures due to the plasma ashing process

2003 Journal of The Korean Society for Aeronautical & Space Sciences
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Stress gradient relaxation and property modification of polysilicon films by ion implantation

2003 Journal of The Korean Society for Aeronautical & Space Sciences
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An Efficient Finite Element Analysis Using Mesh Superposition Technique

2000 Journal of The Korean Society for Aeronautical & Space Sciences
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