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D. S. Sweeney
D. S. Sweeney
Optics
Extreme ultraviolet
Analytical chemistry
Lithography
Reflectivity
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Precision optical aspheres for extreme ultraviolet lithography
1996
Journal of Vacuum Science & Technology B
D.R. Kania
D.P. Gaines
D. S. Sweeney
Gary E. Sommargren
B. La Fontaine
Stephen P. Vernon
Daniel A. Tichenor
J. E. Bjorkholm
F. Zernike
R. N. Kestner
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Citations (5)
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