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Dong-Un Lee
Dong-Un Lee
Samsung
Chemical species
Extreme ultraviolet
Atomic physics
Photolithography
Outgassing
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Effect of EUV exposure upon surface residual chemicals on EUV mask surface
2010
Han-Shin Lee
Jaehyuck Choi
Dong-Un Lee
Hyung-ho Ko
Seong Su Kim
Chan Uk Jeon
Han-Ku Cho
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