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Kazuki Narishige
Kazuki Narishige
Chemical structure
Extreme ultraviolet
Photoresist
Reactive-ion etching
Optics
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EUV resist curing technique for LWR reduction and etch selectivity enhancement
2012
Proceedings of SPIE
Kazuki Narishige
Takayuki Katsunuma
Masanobu Honda
Koichi Yatsuda
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Citations (9)
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