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Ruediger Bauder

Infineon Technologies

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Enhanced Piezoelectric $\mathrm{AL}_{1-\mathrm{X}}\mathrm{SC}_{\mathrm{X}}\mathrm{N}$ RF-MEMS Resonators for Sub-6 GHz RF-Filter Applications: Design, Fabrication and Characterization

2020 MEMS | International Conference on Micro Electro Mechanical Systems
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High Frequency LiNbO3 Bulk Wave Resonator

2019 FCS | International Frequency Control Symposium
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Citations (11)