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Tuan Vo
Tuan Vo
State University of New York System
Sputter deposition
Reflectivity
Design for manufacturability
Wafer
Ion beam deposition
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Magnetron sputtering for the production of EUV mask blanks
2015
Proceedings of SPIE
Patrick Kearney
T. Ngai
Anil Kumar Karumuri
Jung Hwan Yum
Hojune Lee
D. C. Gilmer
Tuan Vo
Frank Goodwin
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