author-photo

Wen-Chuan Peng

2

Papers

2

Citations

Citation Trend

Filter By

Papers (2) Sort By

Journal Conference Others

Novel Poly Gate Shaping by Wet Etch Process in 2xnm NAND Flash Device and Beyond

2014
Show All
- Source
- Cite
- Save
Citations (1)
Novel Clean Concept of Advanced Patterning Film (Amorphous Carbon) for Beyond 2xnm Generation Self-Aligned Double-Patterning (SADP) Process

2014
Show All
- Source
- Cite
- Save
Citations (1)