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Silicon oxide
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Dispositif à semi-conducteurs et son procédé de production
2012
Akinobu Teramoto
teramoto akinobu
Hiroshi Kambayashi
hirosi kanbayasi
Hirokazu Ueda
hirokazu ueda
Yuichiro Morozumi
liangjiaoyouyilang
Katsushige Harada
harada gou han
Kazuhide Hasebe
hasebe kazuhide
Tadahiro Ohmi
oomi tadahiro
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Film forming method, a method of manufacturing a semiconductor device including the same film forming apparatus, and a semiconductor device
2011
suzuki keisuke
kentarou mon ei
liangjiaoyouyilang
yuuiti akira morozumi
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Method of forming a silicon oxide film
2001
hiroki murakami
ikeuti tosiyuki
tosiyuki ikeuti
satou jun
jun satou
liangjiaoyouyilang
yuuiti akira morozumi
hasebe kazuhide
kazuhide hasebe
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