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W.-S. Jhang
W.-S. Jhang
Semiconductor device fabrication
Plasma
Electron temperature
Modeling and simulation
Plasma processing
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Atomic and Molecular Data for Industrial Application Plasmas
2012
M. Y. Song
D.C. Kwon
W.-S. Jhang
S.-H. Kwang
J. H. Park
Y K Kang
J.S. Yoon
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