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Y. Ueno
Y. Ueno
Komatsu Limited
Nd:YAG laser
Laser
Extreme ultraviolet
Pulse duration
Full width at half maximum
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Investigation on the interaction of long duration Nd:YAG laser pulse with Sn plasma for an EUV metrology source
2011
Proceedings of SPIE
Y. Tao
Y. Ueno
S. Yuspeh
Russell A. Burdt
M. S. Tillack
F. Najmabadi
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Citations (5)
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