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D. Matveev
D. Matveev
Analytical chemistry
CMOS
Calibration
Silicon
Ion implantation
4
Papers
32
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Platinum-group elements and gold in sulfide melts from modern arc basalt (Tolbachik volcano, Kamchatka)
2017
Lithos
Michael Zelenski
Vadim S. Kamenetsky
John A. Mavrogenes
Leonid V. Danyushevsky
D. Matveev
Andrey A. Gurenko
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Citations (17)
TCAD calibration of USJ profiles for advanced deep sub-μm CMOS processes
2002
Nuclear Instruments & Methods in Physics Research Section B-beam Interactions With Materials and Atoms
Christoph Zechner
D. Matveev
Axel Erlebach
S. Simeonov
V Menialenko
R. Mickevicius
Majeed A. Foad
Amir Al-Bayati
A. Lebedev
M. Posselt
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Citations (10)
Experimental and Numerical Study of Shallow Trench Isolation Processes
2001
ESSDERC | European Solid-State Device Research Conference
Axel Erlebach
C S Yun
D. Matveev
R. Mickevicius
F Nouri
A. Golnas
S. Zelenka
Wolfgang Fichtner
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Citations (1)
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