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L.Z. Wang
L.Z. Wang
Motorola
Engineering
Titanium
Ion implantation
Salicide
Electronic engineering
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Benefits of SiF/sub 3//sup +/ implanted titanium silicides in advanced CMOS fabrication
1998
VLSIT | Symposium on VLSI Technology
L.Z. Wang
H.-H. Tseng
S. Pozder
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