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Yd Shen
Yd Shen
Thin film
Atomic layer epitaxy
Nanotechnology
Atomic layer deposition
Materials science
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Excellent insulating behavior Al2O3 thin films grown by atomic layer deposition efficiently at room temperature
2012
Yd Shen
Yw Li
Jz Zhang
X. Zhu
Zg Hu
Jh Chu
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Citations (7)
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