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Thilo Pollak
Thilo Pollak
Carl Zeiss AG
Distortion
Immersion lithography
Distortion (optics)
Optics
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A novel projection lens manipulator for high frequent overlay tuning
2020
Thilo Pollak
Wolfgang Emer
Bernd Thüring
Francis Fahrni
Friso Klinkhamer
Wim de Boeij
Wim Bouman
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