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Sungchan Moon
Sungchan Moon
SK Hynix
Nanotechnology
Shrinkage
Materials science
Thermal
Nanostructure
2
Papers
1
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0
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Innovative Process and Material for sub-80nm Lithography (M+Process)
2005
Journal of Photopolymer Science and Technology
Geunsu Lee
Jae-Chang Jung
Sung Kwon Lee
Sung Koo Lee
Taekwan Kim
Jungwoo Park
Cheol-Kyu Bok
Sungchan Moon
Jinwoong Kim
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New shrinkage technology for nano-contact hole formation
2005
Geunsu Lee
Jungwoo Park
Wonwook Lee
Cheol-Kyu Bok
Chang-Moon Lim
Sungchan Moon
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