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Adrie Mackus

Eindhoven University of Technology

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Area-selective atomic layer deposition of ZnO by area activation using electron beam-induced deposition

2019 Chemistry of Materials
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Isotropic atomic layer etching of ZnO using acetylacetone and O2 plasma (Conference Presentation)

2019
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New approaches for area-selective atomic layer deposition of oxides

2018
- Adrie Mackus
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