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Ali Ahanchian
Ali Ahanchian
Differential capacitance
Acceleration
Piezoelectric accelerometer
Capacitive sensing
Surface micromachining
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A low-g bulk micromachined silicon accelerometer with area-changed differential capacitance
2005
Proceedings of SPIE
Badariah Bais
Ali Ahanchian
Yeop Majlis Burhanuddin
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