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Ralf Degenhardt
Ralf Degenhardt
Applied Materials
Chemistry
Scanning electron microscope
Optics
Analytical chemistry
Electron microscope
5
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Means for generating an electro-magnetic field and construction method thereof
2005
Carlo Salvesen
Ralf Degenhardt
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Generateur de faisceaux de particules chargees et ses modes de fonctionnement
2004
Pavel Adamec
Ralf Degenhardt
Hans-Peter Feuerbaum
Harry Munack
Dieter Winkler
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Design and implementation of a detector for on-axis electrons for enabling enhanced imaging of topographical structures
1999
Journal of Vacuum Science & Technology B
Harry Munack
Walter Kögler
Holger Baumgarten
Christian Rübekohl
Pavel Adamec
Ralf Degenhardt
Hans-Peter Feuerbaum
Dieter Winkler
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Electron beam column for in-line applications featuring enhanced imaging of high-aspect-ratio structures by selective detection of on-axis secondary electrons
1999
Harry Munack
Walter Koegler
Holger Baumgarten
Christian Ruebekohl
Pavel Adamec
Ralf Degenhardt
Hans-Peter Feuerbaum
Dieter Winkler
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A charged particle beam tube
1998
Ralf Degenhardt
Hans-Peter Feuerbaum
Dieter Winkler
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