Old Web
English
Sign In
Acemap
>
authorDetail
>
T. Kaminatsui
T. Kaminatsui
Toshiba
Dielectric
Dry etching
Moisture
Materials science
Air gap (plumbing)
1
Papers
16
Citations
0.00
KQI
Citation Trend
Filter By
Interval:
1900~2024
1900
2024
Author
Papers (1)
Sort By
Default
Most Recent
Most Early
Most Citation
No data
Journal
Conference
Others
Cost-effective air-gap interconnects by all-in-one post-removing process
2008
IITC | International Interconnect Technology Conference
N. Nakamura
Noriaki Matsunaga
T. Kaminatsui
K. Watanabe
Hideki Shibata
Show All
Source
Cite
Save
Citations (16)
1